Single-Crystalline 3C-SiC anodically Bonded onto Glass: An Excellent Platform for High-Temperature Electronics and Bioapplications
Author:
Affiliation:
1. Australian Institute for Bioengineering and Nanotechnology, The University of Queensland, Brisbane, Queensland 4072, Australia
2. Department of Precision Engineering, The University of Tokyo, Tokyo 113-8654, Japan
Funder
Australian Research Council
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.7b06661
Reference42 articles.
1. Silicon Carbide as a Platform for Power Electronics
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