Affiliation:
1. National Key Laboratory
of Science and Technology on Micro/Nano Fabrication, Department of
Micro/Nano Electronics and Key Laboratory
for Thin Film and Micro Fabrication of Ministry of Education, Shanghai Jiao Tong University, Shanghai 200240, China
Funder
Ministry of Science and Technology of the People's Republic of China
Shanghai Municipal Education Commission
National Natural Science Foundation of China
Shanghai Committee of Science and Technology of China
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Cited by
110 articles.
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