Additive Fabrication and the Mechanisms of Nucleation and Growth in Chemical Vapor Deposition Processes
Author:
Affiliation:
1. School of Chemical Sciences and Frederick Seitz Materials Research Laboratory, University of Illinois at UrbanaChampaign, Urbana, Illinois 61801
Publisher
American Chemical Society (ACS)
Subject
General Medicine,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ar960102n
Reference65 articles.
1. Jensen, K. S.; Kern, W. InThin Film Processes; Vossen, J. L., Kern, W., Eds.; Academic: Boston, 1991; Vol. II, pp 283−353.
2. Powell, C. F.; Oxley, J. H.; Blocher, J. M., Jr.Vapor Deposition; Wiley: New York, 1966; pp 256−257.
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