1. Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstr. 400, 01328 Dresden, Germany
2. Technische Universität Dresden, D-01062 Dresden, Germany
3. Shenzhen Key Laboratory of Laser Engineering, College of Optoelectronic Engineering, Shenzhen University, 518060 Shenzhen, China
4. Leibniz-Institute for Solid State and Materials Research, Helmholtzstrasse 20, 01069 Dresden, Germany