1. Department of Mechanical Engineering, Seoul National University, Gwanak-Ro, Gwanak-Gu 08826, Republic of Korea
2. DRAM Process Development Team, Samsung Electronics Co., Ltd., Suwon 18448, Republic of Korea
3. Institute of Advanced Machines and Design, Seoul National University, Seoul 08826, Republic of Korea
4. Department of Mechanical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 44919, Republic of Korea
5. Mechanical Engineering Division, School of Energy Systems Engineering, Chung-Ang University, 84 Heukseok-Ro, Dongjak-Gu 06974, South Korea