1. Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China
2. Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China
3. Guangzhou Wondfo Biotech Co., Ltd., Guangzhou 510663, China
4. Hebei Sailhero Environmental Protection High-Tech Co., Ltd., Shijiazhuang 050081, China