Supercritical Fluid Atomic Layer Deposition: Base-Catalyzed Deposition of SiO2
Author:
Affiliation:
1. Department of Chemistry, University of Maine, Orono, Maine 04469, United States
2. Laboratory for Surface Science and Technology, University of Maine, Orono, Maine 04469, United States
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.langmuir.6b01669
Reference52 articles.
1. Ritala, M.; Leskela, M.; Nalwa, H. S.; Eds.Atomic Layer Deposition in Handbook of Thin Film Materials;Academic Press:New York, 2002; Vol.1, p706.
2. Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges
3. Synthesis and Characterization of Silica Membranes Prepared by Pyridine-Catalyzed Atomic Layer Deposition
4. Atomic Layer Deposition of thin Films Using Sequential Surface Reactions
5. Smooth and Conformal TiO2Thin-Film Formation Using Supercritical Fluid Deposition
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