Tuning Sensitivity and Selectivity of Complementary Metal Oxide Semiconductor-Based Capacitive Chemical Microsensors
Author:
Affiliation:
1. ETH Zürich, Physical Electronics Laboratory PEL, HPT H4.2, ETH Hönggerberg, 8093 Zürich, Switzerland
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ac0352272
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