Self-Assembled Monolayers of Alkanethiolates on Palladium Are Good Etch Resists
Author:
Affiliation:
1. Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, Massachusetts 02138
Publisher
American Chemical Society (ACS)
Subject
Colloid and Surface Chemistry,Biochemistry,General Chemistry,Catalysis
Link
https://pubs.acs.org/doi/pdf/10.1021/ja012569l
Reference11 articles.
1. Using Micromachining, Molecular Self-Assembly, and Wet Etching to Fabricate 0.1-1-.mu.m-scale structures of Gold and Silicon
2. Patterned Self-Assembled Monolayers and Meso-Scale Phenomena
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