Ultrahigh Throughput Silicon Nanomanufacturing by Simultaneous Reactive Ion Synthesis and Etching-Reference-Cited by-同舟云学术

Ultrahigh Throughput Silicon Nanomanufacturing by Simultaneous Reactive Ion Synthesis and Etching

Published:2011-09-27 Issue:10 Volume:5 Page:8002-8012
ISSN:1936-0851
Container-title:ACS Nano
language:en
Short-container-title:ACS Nano

Author:

Chen Yi¹,Xu Zhida¹,Gartia Manas R.¹,Whitlock Daren¹,Lian Yaguang¹,Liu G. Logan¹

Affiliation:

1. Micro and Nanotechnology Laboratory, Department of Electrical and Computer Engineering, University of Illinois at Urbana−Champaign, Urbana, Illinois 61801, United States

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/nn2024754

Reference21 articles.

1. Silicon nanowire solar cells

2. Three-dimensional nanopillar-array photovoltaics on low-cost and flexible substrates

3. Optical Absorption Enhancement in Amorphous Silicon Nanowire and Nanocone Arrays

4. A growth mechanism for mercury whiskers

5. VAPOR‐LIQUID‐SOLID MECHANISM OF SINGLE CRYSTAL GROWTH

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