Area-Selective ALD of TiO2 Nanolines with Electron-Beam Lithography
Author:
Affiliation:
1. Department of Material Science and Engineering, The University of Texas at Dallas, Richardson, Texas 75080, United States
2. Dongjin Semichem Co. Ltd., 625-3, Yodang-ri, Yangam-myun, Hwasung-si, Kyungki-do 445-930, South Korea
Funder
Korea Evaluation Institute of Industrial Technology
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/jp5037662
Reference47 articles.
1. Formation and Structure of Self-Assembled Monolayers
2. Chain Length Dependence and Sensing Capabilities of the Localized Surface Plasmon Resonance of Silver Nanoparticles Chemically Modified with Alkanethiol Self-Assembled Monolayers
3. Electronic functionalization of the surface of organic semiconductors with self-assembled monolayers
4. Molecules on Si: Electronics with Chemistry
5. Organic-Inorganic Hybrid Nano-laminates Fabricated by Ozone-assisted Molecular-atomic Layer Deposition
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