Investigation of ternary transition-metal nitride systems by reactive cosputtering-Reference-Cited by-同舟云学术

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Investigation of ternary transition-metal nitride systems by reactive cosputtering

Published:1993-01-01 Issue:1 Volume:5 Page:32-35
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Van Dover R. B.,Hessen B.,Werder D.,Chen C. H.,Felder R. J.

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm00025a010

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