In Situ Electrical Characterization of Carbon Nanotubes in O2 and N2 Plasma to Explain their Field Emission Instability

Author:

Kuo Yen-Hung1ORCID,Fang Jen-Kuang2,Chen Jen-Chun2,Shih Pai-Sheng2,Chen Ping-Chun1ORCID,Yang Yung-Kai1ORCID,Tsai Hsin-Jung1ORCID,Hsu Wen-Kuang1ORCID

Affiliation:

1. Department of Materials Science and Engineering, National Tsing-Hua University, Hsinchu 30013, Taiwan

2. Corporate R&D Center, Advanced Semiconductor Engineering Inc., No. 26, Jing 3rd Road, Nanzih District, Kaohsiung 811641, Taiwan

Funder

Advanced Semiconductor Engineering, Inc.

Publisher

American Chemical Society (ACS)

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