Role of Cu−Benzotriazole Nanoparticles in Passivation Film Formation-Reference-Cited by-同舟云学术

Role of Cu−Benzotriazole Nanoparticles in Passivation Film Formation

Published:2009-09-24 Issue:42 Volume:113 Page:18003-18013
ISSN:1932-7447
Container-title:The Journal of Physical Chemistry C
language:en
Short-container-title:J. Phys. Chem. C

Author:

Li Yan¹,Gong Menglian¹,Ramji Karpagavalli¹,Li Yuzhuo¹

Affiliation:

1. School of Chemistry and Chemical Engineering, Sun Yat-Sen University, Guangzhou 510275, China, Center for Advanced Materials Processing, Clarkson University, Potsdam, New York 13699, and BASF SE, G-CAE/ND - M322, 67056 Ludwigshafen, Germany

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/jp904782t

Reference56 articles.

1. Sorption and partitioning parameters of benzotriazole compounds

2. Microelectronic Applications of Chemical Mechanical Planarization

3. Investigation of copper contamination into interlayer dielectrics by copper process

4. Diffusion-Limited Agglomeration and Defect Generation during Chemical Mechanical Planarization

5. Chemical mechanical planarization for microelectronics applications

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