Effective Nanometer Airgap of NEMS Devices Using Negative Capacitance of Ferroelectric Materials
Author:
Affiliation:
1. School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, United States
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/nl5004416
Reference26 articles.
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