1. School of Electronic Information Engineering, Hebei University of Technology, Tianjin 300130, People’s Republic of China
2. Tianjin Key Laboratory of Electronic Materials and Devices, Hebei University of Technology, Tianjin 300130, People’s Republic of China
3. Hebei Collaborative Innovation Center of Microelectronic Materials and Technology on Ultra Precision Processing (CIC), Tianjin 300130, China
4. Hebei Engineering Research Center of Microelectronic Materials and Devices (ERC), Tianjin 300130, China