1. Zhejiang Provincial Key Laboratory
of Solid Waste Treatment and Recycling, College of Environmental Science
and Engineering, Zhejiang Gongshang University, Hangzhou, 310018, China
2. College of Environmental and
Chemical Engineering, Shanghai University, 99 Shangda Road, Shanghai 200444, China
3. Semiconductor Manufacturing International (Shanghai) Corporation, 18 Zhangjiang
Road, Shanghai 201203, China
4. Institute of Microelectronics, Peking University, No. 5 Yiheyuan Road, Haidian District,
Beijing 100871, China