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Seeding Atomic Layer Deposition of High-k Dielectrics on Epitaxial Graphene with Organic Self-Assembled Monolayers

  • Published:2011-05-12 Issue:6 Volume:5 Page:5223-5232
  • ISSN:1936-0851
  • Container-title:ACS Nano
  • language:en
  • Short-container-title:ACS Nano

Author:

Alaboson Justice M. P.12,Wang Qing Hua1,Emery Jonathan D.1,Lipson Albert L.1,Bedzyk Michael J.123,Elam Jeffrey W.4,Pellin Michael J.2,Hersam Mark C.1

Affiliation:

1. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States

2. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, United States

3. Department of Physics and Astronomy, Northwestern University, Evanston, Illinois 60208, United States

4. Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439, United States

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

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