1. Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, P. R. China
2. School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, P. R. China
3. CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei 230026, P. R. China
4. Hefei National Laboratory, Hefei 230088, P. R. China
5. Origin Quantum Computing Company Limited, Hefei 230026, P. R. China
6. Beijing Superstring Academy of Memory Technology, Beijing 100176, P. R. China
7. School of Advanced Manufacturing Engineering, Hefei University, Hefei 230601, P. R. China
8. Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, P. R. China