1. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
2. International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University, Xi’an 710049, China
3. School of Instrument Science and Technology, Xi’an Jiaotong University, Xi’an 710049, China
4. Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai, Yantai 264000, China
5. School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
6. State Key Laboratory for Strength and Vibration of Mechanical Structures, Department of Engineering Mechanics, School of Aerospace Engineering, Xi’an Jiaotong University, Xi’an 710049, China