1. Bachelor Program in Semiconductor Materials and Fabrication, Ming Chi University of Technology, New Taipei City 243, Taiwan
2. Department of Materials Engineering and Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei City 243, Taiwan
3. College of Engineering and Center for Green Technology, Chang Gung University, Taoyuan 333, Taiwan
4. Department of Physics, National Chung Hsing University, Taichung 40227, Taiwan
5. International Ph.D. Program in Plasma and Thin Film Technology, Department of Materials Engineering and Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei City 243, Taiwan
6. Institute of Physics, Academia Sinica, Taipei 115, Taiwan