Porogen Approach for the Fabrication of Plasma-Polymerized Nanoporous Polysiloxane Films
Author:
Affiliation:
1. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8565 and 305-8568, Japan
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp063013t
Reference41 articles.
1. Characterization of Diffusion-Controlled Mass Transport through Nanoporous and Nanothin Films Plasma Polymerized on a Sputtered Platinum Electrode
2. Plasma polymerization of silicon organic membranes for gas separation
3. Composite plasma-polymerized organosiloxane-based material for hydrocarbon vapor selectivity
4. Study of plasma mechanisms of hybrid a-SiOC:H low-k film deposition from decamethylcyclopentasiloxane and cyclohexene oxide
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