Ion-Beam-Induced Dual-Tone Imaging of Polyimide via Two-Step Imidization-Reference-Cited by-同舟云学术

Ion-Beam-Induced Dual-Tone Imaging of Polyimide via Two-Step Imidization

Published:2002-09-14 Issue:10 Volume:14 Page:4186-4191
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Suzuki Yasuyuki¹,Maekawa Yasunari¹,Yoshida Masaru¹,Maeyama Katsuya¹,Yonezawa Noriyuki¹

Affiliation:

1. Department of Material Development, Takasaki Radiation Chemistry Research Establishment, Japan Atomic Energy Research Institute, 1233 Watanuki-machi, Takasaki, Gunma 370-1292, Japan, and Department of Organic and Polymer Materials Chemistry, Tokyo University of Agriculture and Technology, 2-24-16 Naka-machi, Koganei, Tokyo 184-8588, Japan

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm020223j

Reference33 articles.

1. High-resolution focused ion beam lithography

2. A low magnification focused ion beam system with 8 nm spot size

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