Laser Photochemical Etching of Silica: Nanodomains of Crystalline Chaoite and Silica in Amorphous C/Si/O/N Phase

Author:

Pola Josef1,Ouchi Akihiko1,Bakardjieva Snejana1,Vorlíček Vladimír1,Maryško Miroslav1,Šubrt Jan1,Bastl Zdeněk1

Affiliation:

1. Laboratory of Laser Chemistry, Institute of Chemical Process Fundamentals, ASCR, 16502 Prague, Czech Republic, National Institute of Advanced Industrial Science and Technology, AIST, Tsukuba, Ibaraki 305-8565, Japan, Institute of Inorganic Chemistry, ASCR, 25068 Řež, Czech Republic, Institute of Physics, ASCR, 18223 Prague 8, Czech Republic, and J. Heyrovský Institute of Physical Chemistry, ASCR, 18223 Prague 8, Czech Republic

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

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