Oxidation of Fluorinated Amorphous Carbon (a-CFx) Films
Author:
Affiliation:
1. Department of Chemical Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213
2. National Energy Technology Laboratory, Pittsburgh, Pennsylvania 15236-0940
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/la902375f
Reference22 articles.
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5. Superhydrophobic CFx Coating via In-Line Atmospheric RF Plasma of He−CF4−H2
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