Advanced Nanocluster Ion Source Based on High-Power Impulse Magnetron Sputtering and Time-Resolved Measurements of Nanocluster Formation
Author:
Affiliation:
1. Nakajima Designer Nanocluster Assembly Project, JST-ERATO, 3-2-1 Sakado, Takatsu-ku, Kawasaki 213-0012, Japan
2. Department of Chemistry, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp406521v
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