BHCl2 Formation during Chemical Vapor Deposition of Boron in a Dual-Impinging Jet Reactor
Author:
Affiliation:
1. Department of Chemical Engineering, Middle East Technical University, Ankara 06531, Turkey
Publisher
American Chemical Society (ACS)
Subject
Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ie970225r
Reference22 articles.
1. Forced and natural convective mass transfer in multicomponent gaseous mixtures
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