1. Division of Advanced Chemical Technology, Korea Research Institute of Chemical Technology (KRICT), 305-600, Taejon, Korea, Department of Chemical Engineering, Sogang University, 121-742, Seoul, Korea, DongWoo Chemical Company Limited, 451-820, PyeongTaek, KunggiDo, Korea, and Institute of Microsystem Technology (IMTEK), Albert-Ludwigs-University, D-79110 Freiburg, Germany