1. Microsystems Technology Lab, Massachusetts Institute of Technology, 77 Massachusetts
Ave., Cambridge, Massachusetts 02139, United States
2. Energy Compression Inc., Beverly, Massachusetts 01915, United States
3. Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts
Ave., Cambridge, Massachusetts 02139, United States
4. Department of Mechanical & Industrial Engineering, Northeastern University, 360 Huntington Avenue, Boston, Massachusetts 02115, United States