Cobalt(I) Olefin Complexes: Precursors for Metal–Organic Chemical Vapor Deposition of High Purity Cobalt Metal Thin Films
Author:
Affiliation:
1. Department of Chemistry, University of Bath, Bath BA2 7AY, United Kingdom
2. SAFC-Hitech, Power Road, Bromborough, Wirral, CH62 3QF, United Kingdom
Funder
Engineering and Physical Sciences Research Council
University of Bath
Sigma-Aldrich Corporation
Publisher
American Chemical Society (ACS)
Subject
Inorganic Chemistry,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.inorgchem.6b01146
Reference84 articles.
1. Formation of highly reliable Cu/low-k interconnects by using CVD Co barrier in dual damascene structures
2. Characterization of Selectively Deposited Cobalt Capping Layers: Selectivity and Electromigration Resistance
3. Mechanism of Co Liner as Enhancement Layer for Cu Interconnect Gap-Fill
4. Giant magnetoresistance in magnetic nanostructures
5. Giant magnetoresistance in magnetic nanostructures. Recent developments
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