1. Dept.
of Microelectronic, FEEC, Brno University of Technology (BUT), Technická 10, CZ-616 00 Brno, Czech Republic
2. Central
European Institute of Technology, Brno University of Technology (BUT), Purkyňova 648/125, 621 00 Brno-Medlánky, Czech Republic
3. Northwestern Polytechnical University, School of Mechanical
Engineering, Dept. of Microsystem Engineering, 127 West Youyi Road, Xi’an, Shaanxi 710072, People’s Republic of China
4. RECAMO, Masaryk Memorial Cancer Institute, Žlutý kopec 7, CZ-656 53 Brno, Czech Republic