Improvement of the Correlative AFM and ToF-SIMS Approach Using an Empirical Sputter Model for 3D Chemical Characterization
Author:
Affiliation:
1. Advanced Analysis Center and ‡Green City Technology Institute, Korea Institute of Science & Technology, Seoul 02792, Korea
Funder
Ministry of Science, ICT and Future Planning
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.analchem.7b03431
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