1. University of Zurich, Department of Chemistry, Winterthurerstrasse 190, CH-8057 Zurich, Switzerland
2. NSF Center for Extreme Ultraviolet Science and Technology and Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, Colorado 80523, United States
3. Swiss Federal Laboratories for Materials Science and Technology (EMPA), Überlandstrasse 129, CH-8600, Dübendorf, Switzerland