Mass-Fabrication Scheme of Highly Sensitive Wireless Electrodeless MEMS QCM Biosensor with Antennas on Inner Walls of Microchannel

Author:

Zhou Lianjie1ORCID,Kato Fumihito2,Iijima Masumi3,Nonaka Tomoyuki4,Kuroda Shun’ichi5ORCID,Ogi Hirotsugu1ORCID

Affiliation:

1. Graduate School of Engineering, Osaka University, Yamadaoka 2-1, Suita, Osaka 565-0871, Japan

2. Department of Mechanical Engineering, Nippon Institute of Technology, Gakuendai 4-1, Miyashiro-machi, Minamisaitama, Saitama 345-8501, Japan

3. Department of Nutritional Science and Food Safety, Tokyo University of Agriculture, Sakuragaoka 1-1-1, Setagaya-ku, Tokyo 156-8502, Japan

4. Samco Inc., Waraya-cho 36, Takeda, Fushimi-ku, Kyoto 612-8443, Japan

5. SANKEN, Osaka University, Mihogaoka 8-1, Ibaraki, Osaka 567-0047, Japan

Funder

Development of Advanced Measurement and Analysis Systems

Japan Society for the Promotion of Science

Publisher

American Chemical Society (ACS)

Subject

Analytical Chemistry

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