1. Chongqing Key Laboratory of Micro-Nano Systems and Smart Transduction, Chongqing Key Laboratory of Colleges and Universities on Micro-Nano Systems Technology and Smart Transducing, Collaborative Innovation Center on Micro-Nano Transduction and Intelligent Eco-Internet of Things, Chongqing Academician and Expert Workstation, Chongqing Technology and Business University, Nan’an District, Chongqing 400067, China
2. Department of Microsystems (IMS), Faculty of Technology, Natural Sciences and Maritime Sciences, University of South-Eastern Norway, Postboks 235, Kongsberg 3603, Norway
3. Sensovann AS, Raveien 215, Borre 3184, Norway
4. Biophysics and Medical Technology, Department of Physics, Norwegian University of Science and Technology, Trondheim NO-7491, Norway
5. Xi’an Jiaotong University, Xi’an 710049, China