1. Ecole Polytechnique
Fédérale de Lausanne (EPFL), Institute of Microengineering
(IMT), Sensors, Actuators and Microsystems Laboratory (SAMLAB), Maladière 71b, 2000 Neuchâtel, Switzerland
2. Ecole Nationale
Supérieure des Mines, SPIN-EMSE, CNRS: UMR5307, LGF, 42023 Saint-Etienne, France