Sub-20 nm Si/Ge Superlattice Nanowires by Metal-Assisted Etching
Author:
Affiliation:
1. Max Planck Institute of Microstructure Physics, Weinberg 2, D-06120 Halle, Germany, Interdisciplinary Center of Materials Science, Martin Luther University Halle-Wittenberg, Heinrich-Damerow-Strasse 4, D-01620 Halle, Germany
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/nl900751g
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