Flexible Piezoelectric Energy-Harvesting Exploiting Biocompatible AlN Thin Films Grown onto Spin-Coated Polyimide Layers-Reference-Cited by-同舟云学术

Flexible Piezoelectric Energy-Harvesting Exploiting Biocompatible AlN Thin Films Grown onto Spin-Coated Polyimide Layers

Published:2018-10-03 Issue: Volume: Page:
ISSN:2574-0962
Container-title:ACS Applied Energy Materials
language:en
Short-container-title:ACS Appl. Energy Mater.

Author:

Algieri Luciana¹²^ORCID,Todaro Maria Teresa¹³,Guido Francesco¹,Mastronardi Vincenzo¹,Desmaële Denis¹,Qualtieri Antonio¹,Giannini Cinzia⁴,Sibillano Teresa⁴,De Vittorio Massimo¹²

Affiliation:

1. Istituto Italiano di Tecnologia (IIT), Center for Biomolecular Nanotechnologies, Via Barsanti, 73010 Arnesano, Italy

2. Dipartimento Ingegneria dell’Innovazione, Università del Salento, via Monteroni, 73100 Lecce, Italy

3. Istituto di Nanotecnologia Consiglio Nazionale delle Ricerche NANOTEC, c/o Campus Ecotekne, via Monteroni, 73100 Lecce, Italy

4. Istituto di Cristallografia, Consiglio Nazionale delle Ricerche, v. Amendola 122/O, 70126 Bari, Italy

Publisher

American Chemical Society (ACS)

Subject

Electrical and Electronic Engineering,Materials Chemistry,Electrochemistry,Energy Engineering and Power Technology,Chemical Engineering (miscellaneous)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaem.8b00820

Reference33 articles.

1. Highly-Efficient, Flexible Piezoelectric PZT Thin Film Nanogenerator on Plastic Substrates

2. Piezoelectric BaTiO3 Thin Film Nanogenerator on Plastic Substrates

3. Physical properties of polycrystalline aluminium nitride films deposited by magnetron sputtering

4. Flexible-CMOS and biocompatible piezoelectric AlN material for MEMS applications

5. Synthesis of c-axis oriented AlN thin films on different substrates: A review

Cited by 56 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Review on Soft Ionic Touch Point Sensors;ENERGY & ENVIRONMENTAL MATERIALS;2024-07-12

2. 3D printed energy devices: generation, conversion, and storage;Microsystems & Nanoengineering;2024-07-02

3. Fluid Flow to Electricity: Capturing Flow-Induced Vibrations with Micro-Electromechanical-System-Based Piezoelectric Energy Harvester;Micromachines;2024-04-27

4. Biodegradable ferroelectric molecular crystal with large piezoelectric response;Science;2024-03-29

5. Enhancing Manufacturability of SU-8 Piezoelectric Composite Films for Microsystem Applications;Micromachines;2024-03-14