1. UK Catalysis Hub, Research Complex at Harwell, Rutherford Appleton Laboratory, Oxford OX11 0FA, United Kingdom
2. Department of Chemistry, University College London, Kathleen Lonsdale Building, Gordon Street, London WC1H 0AJ, United Kingdom
3. Department of Materials Science and Engineering, Southern University of Science and Technology, No. 1088 Xueyuan Boulevard, Shenzhen, Guangdong 518055, China
4. MI DE DOCCS Defectivity EUV Reticle & Plasma, ASML, De Run 6501, 5504 DR Veldhoven, The Netherlands
5. Department of Chemistry, University of Illinois at Urbana−Champaign, Urbana, Illinois 61801, United States