Thermodynamics of the Phase Formation of the Titanium Silicides
Author:
Affiliation:
1. Chemistry Department and Materials Research Center, Binghamton UniversitySUNY, Binghamton, New York 13902-6016
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm950386q
Reference25 articles.
1. Selective Deposition of TiSi2 from H 2 ‐ TiCl4 Gas Mixtures and Si: Aspects of Thermodynamics Including Critical Evaluation of Thermochemical Data in the Ti‐Si System
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