1. Institute of Technical Physics and Materials Science, Centre for Energy Research, Budapest 1121, Hungary
2. Research Institute of Biomolecular and Chemical Engineering, University of Pannonia, Veszprém 8200, Hungary
3. National Institute for Research & Development in Microtechnologies, Bucharest 077190, Romania
4. “Ilie Murgulescu” Institute of Physical Chemistry of the Romanian Academy, Bucharest 060021, Romania
5. NANOM MEMS SRL, Râşnov 505400, Romania
6. Institute of Microelectronics and Technology, Óbuda University, Budapest 1034, Hungary