1. State
Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, No. 1 Tsinghuayuan, Haidian District, Beijing 100084, China
2. Key
Laboratory for Precision and Non-traditional Machining Technology
of Ministry of Education, Department of Mechanical Engineering, Dalian University of Technology, No. 2 Linggong Road, Ganjingzi
District, Dalian 116024, China
3. Institute
of Electronics, Chinese Academy of Sciences, No. 19 of North fourth West Road, Haidian District, Beijing 100190, China