Indium Oxide Atomic Layer Deposition Facilitated by the Synergy between Oxygen and Water
Author:
Affiliation:
1. Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439, United States
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm103637t
Reference27 articles.
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5. MOCVD-Derived Highly Transparent, Conductive Zinc- and Tin-Doped Indium Oxide Thin Films: Precursor Synthesis, Metastable Phase Film Growth and Characterization, and Application as Anodes in Polymer Light-Emitting Diodes
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