1. FMF, Freiburg Materials Research
Center, University of Freiburg, Stefan-Meier-Straße
21, 79104 Freiburg, Germany
2. IWM, Fraunhofer Institute for Mechanics of Materials, Woehlerstraße
11, 79108 Freiburg, Germany
3. IMTEK, Department of Microsystems
Engineering, University of Freiburg, Georges-Köhler-Allee
103, D-79110 Freiburg, Germany