Modified Structure Zone Model to Describe the Morphological Evolution of ZnO Thin Films Deposited by Reactive Sputtering
Author:
Affiliation:
1. Department of Chemical, Biochemical and Materials Engineering, Stevens Institute of Technology, Hoboken, New Jersey 07030, and Bell Laboratories, Lucent Technologies, Murray Hill, New Jersey 07974
Publisher
American Chemical Society (ACS)
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cg025596b
Reference10 articles.
1. The microstructure of sputter‐deposited coatings
2. Revised structure zone model for thin film physical structure
3. The development of grain structure during growth of metallic films
4. Fundamental structure forming phenomena of polycrystalline films and the structure zone models
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