Photophysics of difluoromethylene (~A 1B1 (0,6,0)) excited by a krypton fluoride laser at 248 nm. 3. Direct measurements of 1B1 collisional removal rates
Author:
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry,General Engineering
Link
https://pubs.acs.org/doi/pdf/10.1021/j100241a022
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3. Planar laser-induced fluorescence of CF2 in O2/CF4 and O2/C2F6 chamber-cleaning plasmas: Spatial uniformity and comparison to electrical measurements;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1999-03
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