Influence of Discharge Parameters on the Resultant Sputtered Crater Shapes for a Radio Frequency Glow Discharge Atomic Emission Source
Author:
Affiliation:
1. Department of Chemistry, Howard L. Hunter Chemical Laboratory, Clemson University, Clemson, South Carolina 29634-1905
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ac960259t
Reference36 articles.
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3. In-Depth Compositional Profile Analysis of Alloys Using Optical Emission Glow Discharge Spectrography
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