Atomic Force Microscopy-Based Nanolithography on Silicon Using Colloidal Au Nanoparticles As a Nanooxidation Mask
Author:
Affiliation:
1. Center for Nanoscale Science & Technology (CNST), College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/la000705e
Reference24 articles.
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