Electrolyzed Water as the Novel Cleaning Media in Ultra-Large-Scale Integration and Liquid-Crystal Display Manufacturing-Reference-Cited by-同舟云学术

Electrolyzed Water as the Novel Cleaning Media in Ultra-Large-Scale Integration and Liquid-Crystal Display Manufacturing

Published:1999-05-14 Issue:12 Volume:15 Page:4165-4170
ISSN:0743-7463
Container-title:Langmuir
language:en
Short-container-title:Langmuir

Author:

Yamanaka Koji¹,Imaoka Takashi¹,Futatsuki Takashi¹,Yamashita Yukimari¹,Mitsumori Ken-ichi¹,Kasama Yasuhiko¹,Aoki Hidemitsu¹,Yamasaki Shinya¹,Aoto Nahomi¹

Affiliation:

1. ORGANO Corporation, 1-4-9 Kawagishi, Toda, Saitama 335-0015, Japan

Publisher

American Chemical Society (ACS)

Subject

Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/la981153r

Reference18 articles.

1. Segregation and Removal of Metallic Impurity at Interface of Silicon and Fluorine Etchant

2. Particle deposition and removal in wet cleaning processes for ULSI manufacturing

3. Christenson, K. K.; Smith, S. M.; Werho, D.Microcontamination1994, June, 47.

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