Theoretical Design of MOFs and PSA Process for Efficient Separation of CF<sub>4</sub>/NF<sub>3</sub>-Reference-Cited by-同舟云学术

Theoretical Design of MOFs and PSA Process for Efficient Separation of CF₄/NF₃

Published:2023-04-26 Issue:18 Volume:62 Page:7103-7113
ISSN:0888-5885
Container-title:Industrial & Engineering Chemistry Research
language:en
Short-container-title:Ind. Eng. Chem. Res.

Author:

Zhang Minhua¹²³,Liu Lin¹²³,Li Qinghua¹²³,Gong Hao¹²³^ORCID,Chen Yifei¹²³^ORCID

Affiliation:

1. Key Laboratory for Green Chemical Technology of Ministry of Education, R&D Center for Petrochemical Technology, Tianjin University, Tianjin 300072, China

2. Zhejiang Institute of Tianjin University, Ningbo 315201, Zhejiang, China

3. State Key Laboratory of Engines, Tianjin University, Tianjin 300072, China

Funder

Natural Science Foundation of Tianjin City

Publisher

American Chemical Society (ACS)

Subject

Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.iecr.2c04592

Reference54 articles.

1. Electrochemical synthesis and application of NF3

2. SF 6, a Preferable Etchant for Plasma Etching Silicon

3. Removal of CF4 from NF3 at the phase interface

4. Comparison of the Etching and Plasma Characteristics of Discharges in CF 4 and NF 3

5. Modelling sorption and diffusion of NF 3 and CF 4 in Teflon AF perfluoropolymer membranes

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